Bio Medical Microsystems Semester 8 (BE Fourth Year) BE Biomedical Engineering University of Mumbai Topics and Syllabus

CBCGS [2019 - current]

CBGS [2015 - 2018]

Old [2000 - 2014]

Units and Topics

#	Unit/Topic	Marks
100	Basics of Miniaturization and Materials	-
200	Mems Fabrication Processes	-
300	Micro Total Analysis Systems (µTas)	-
400	Micro/ Nano Biosensors	-
500	Drug Delivery Devices	-
600	Microsystem Packaging	-
	Total	-

100 Basics of Miniaturization and Materials

200 Mems Fabrication Processes

Fabrication techniques in MEMS: Bulk micromachining, Surface micromachining, and LIGA.
Cleaning processes: RCA, Piranha.
Deposition processes for metals: e-beam evaporation, thermal evaporation and DC Sputter.
Deposition processes for dielectrics: Physical (RF Sputter) and Chemical Techniques (CVD: APCVD, LPCVD, PECVD, and HWCVD).
Polymers coating techniques: spinning, spraying and electrodeposition.
Photolithography: light sources (UV, DUV, and EUV), photoresist, mask design and fabrication using EBL, dark and bright field photo-mask, different projection systems in lithography, detailed study of lithography process, study of fabrication processes like optical grating structure, SiO2 cantilever , SiNx cantilever and basics of EBL.
Etching Processes : Dry (RIE, DRIE) and wet etching.
Doping – ion implantation and diffusion.
Soft lithography: Micro contact Printing, Imprinting or hot embossing, and Replica Molding.
Surface characterization techniques: AFM, SEM, Profilometer, Elipsometer, Fluorimeter.

300 Micro Total Analysis Systems (µTas)

Basic block diagram: importance of µ-TAS
Flow techniques in µ-fluidics: pressure driven force, electro-kinematics; electroosmosis, electrophoresis, dielectrophoresis.
Components in µ-TAS: Micropump, microvalves, microchannels.
µ-TAS: separation and mixing techniques.
Fabrication of micro-channels: SU8 channel, glass channel, silicon channel.

400 Micro/ Nano Biosensors

Biosensor: definition, block diagram and working
Classification based on the basis of detection techniques: Electric Magnetic, Optical, Thermal, Mechanical, and Chemical.
Basic steps involved in the development of biosensors: surface modification, immobilization, integration with transducer.
Examples: (i) Design, fabrication of SiO cantilever for antibody detection, (ii) Design, fabrication of Optical waveguide biosensor, (iii) Microfluidics based biosensor.

500 Drug Delivery Devices

Overview of drug delivery systems
Types of drug delivery systems
Different parts of drug delivery system
MEMS based drug delivery systems: Implantable drug delivery systems (IDDS), Micro needles and its fabrication, Micro particles for oral drug delivery.

600 Microsystem Packaging