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Bio Medical Microsystems Semester 8 (BE Fourth Year) BE Biomedical Engineering University of Mumbai Topics and Syllabus

CBCGS [2019 - current]
CBGS [2015 - 2018]
Old [2000 - 2014]


100 Basics of Miniaturization and Materials
  • Dimensional effect on engineering systems
  • Clean room classification
  • Scaling Laws in Miniaturization
  • MEMS & Micro system products
  • Substrates and Wafers
  • Properties of Silicon Compounds SiO2, Si3N4, Polysilicon, Amorphous silicon
  • Polymers: Dielectric polymers, Conducting polymers, and piezoelectric polymers.
200 Mems Fabrication Processes
  • Fabrication techniques in MEMS: Bulk micromachining, Surface micromachining, and LIGA.
  • Cleaning processes: RCA, Piranha.
  • Deposition processes for metals: e-beam evaporation, thermal evaporation and DC Sputter.
  • Deposition processes for dielectrics: Physical (RF Sputter) and Chemical Techniques (CVD: APCVD, LPCVD, PECVD, and HWCVD).
  • Polymers coating techniques: spinning, spraying and electrodeposition.
  • Photolithography: light sources (UV, DUV, and EUV), photoresist, mask design and fabrication using EBL, dark and bright field photo-mask, different projection systems in lithography, detailed study of lithography process, study of fabrication processes like optical grating structure, SiO2 cantilever , SiNx cantilever and basics of EBL.
  • Etching Processes : Dry (RIE, DRIE) and wet etching.
  • Doping – ion implantation and diffusion.
  • Soft lithography: Micro contact Printing, Imprinting or hot embossing, and Replica Molding.
  • Surface characterization techniques: AFM, SEM, Profilometer, Elipsometer, Fluorimeter.
300 Micro Total Analysis Systems (┬ÁTas)
  • Basic block diagram: importance of µ-TAS
  • Flow techniques in µ-fluidics: pressure driven force, electro-kinematics; electroosmosis, electrophoresis, dielectrophoresis.
  • Components in µ-TAS: Micropump, microvalves, microchannels.
  • µ-TAS: separation and mixing techniques.
  • Fabrication of micro-channels: SU8 channel, glass channel, silicon channel.
400 Micro/ Nano Biosensors
  • Biosensor: definition, block diagram and working
  • Classification based on the basis of detection techniques: Electric Magnetic, Optical, Thermal, Mechanical, and Chemical.
  • Basic steps involved in the development of biosensors: surface modification, immobilization, integration with transducer.
  • Examples: (i) Design, fabrication of SiO cantilever for antibody detection, (ii) Design, fabrication of Optical waveguide biosensor, (iii) Microfluidics based biosensor.
500 Drug Delivery Devices
  • Overview of drug delivery systems
  • Types of drug delivery systems
  • Different parts of drug delivery system
  • MEMS based drug delivery systems: Implantable drug delivery systems (IDDS), Micro needles and its fabrication, Micro particles for oral drug delivery.
600 Microsystem Packaging
  • Importance of packaging
  • Packaging materials
  • Packaging techniques
  • Wafer bonding.
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